SMC XLH-25 high vacuum angle valve with 25mm port size. The XL series provides excellent thermal conductivity for uniform temperature across the valve body, reducing gas condensation. Constructed without heavy metals such as nickel or chrome for low sputtering yield. Pneumatically actuated for reliable vacuum system control.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• High vacuum angle valve
• Type: manual, bellows seal
• Flange size: 16 ~ 50
• Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
• Auto switches not available